Harmonic Drive LLC | 247 Lynnfield St. Peabody, MA 01960 | 800-921-3332
Harmonic Drive and Harmonic Planetary are registered trademarks of Harmonic Drive LLC.


Products for the Semiconductor Market

Harmonic Drive® products are used extensively in wafer and flat panel transfer robots as well as CMP and ion implant equipment. A wide variety of standard and customized designs are available to meet the high precision requirements of semiconductor manufacturing equipment and robotics.
Our products provide the highest torque density of any product in its class and are available in sizes ranging from 13mm to 330mm in diameter. Our US Headquarters and manufacturing facility in Massachusetts, is ISO 9001 and AS9100 registered and produces the majority of products we sell.

Semiconductor applications for Harmonic Drive® Products

Miniature Gearheads Miniature Actuators Hollow Shaft Actuators Harmonic Planetary®

CSF mini gearheads provide high positioning accuracy in a super-compact package. Compact 4-point contact ball bearing is mounted in the main shaft. Available in five sizes and four ratios, the CSF mini gearheads feature shaft or flange outputs.

CSF-2UP

CSF-2UP

These new gear units have an ultra-flat configuration with high-moment stiffness.

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CSF-2XH

CSF-2XH

Designed to be coupled directly to a servomotor, the motor shaft is attached directly to the gearhead input element. Available with flange output or shaft output.

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CSF-1U-CC

CSF-1U-CC

Featuring a shaft output, this gearhead is designed to be coupled directly to a high performance small servomotor.

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CSF-1U-CC-F

CSF-1U-CC-F

Featuring a flange output, this gearhead is designed to be coupled directly to a high performance small servomotor.

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CSF-1U

CSF-1U

Featuring both an input and output shaft, this gearhead is very compact and easy to use.

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CSF-1U-F

CSF-1U-F

CSF Mini Gearheads provide high positioning accuracy in a very compact package. Compact 4-point contact ball bearing mounted in main shaft.

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We offer a full line of DC, AC and brushless actuators.

RSF-Supermini

RSF-Supermini

Small enough to fit inside the finger of a robotic hand, these servo actuators operate with a wide range of drivers. Peak torque .13~1.4 Nm, max speed 100~333 rpm.

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RSF-Mini

RSF-Mini

Available in 3 sizes, these brushless servo actuators deliver exceptional positioning accuracy in a compact package. Peak torque 1.8~28 Nm, max speed 60~200 rpm.

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FHA-Mini Integrated Drive

FHA-Mini Integrated Drive

Mini actuator with an integrated servo drive utilizing CANopen® communication. Features a single cable connection with only 4 wires needed: CANH, CANL, +24VDC, 0VDC.

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FHA-Mini Dual Absolute

FHA-Mini Dual Absolute

Introducing new options for FHA-C mini (24VDC): DUAL Absolute Encoders and Panel Mount Connectors. Extremely small actuators deliver high torque with exceptional accuracy and repeatability. Peak torque 1.8~28 Nm, max speed 60~200 rpm.

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FHA-Mini

FHA-Mini

Extremely small Hollow Shaft Actuators that deliver high torque with exceptional accuracy and repeatability. Peak torque 1.8~28 Nm, max speed 60~200 rpm.

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These brushless actuators feature a large hole through that allows wires, tubing, laser beams or other components to pass directly through the axis of rotation.

FHA-Mini

FHA-Mini

Extremely small Hollow Shaft Actuators deliver high torque with exceptional accuracy and repeatability. Peak torque 1.8~28 Nm, max speed 60~200 rpm.

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FHA-C

FHA-C

Super-flat hollow shaft actuators with high torque, high positioning accuracy and high torsional stiffness. Peak torque 39~820 Nm, max speed 22~96 rpm.

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FHA-C PR

FHA-C PR

Hollow shaft actuators available in 4 sizes with 5 reduction ratios. FHA-C-PR offers high-precision rotary positioning with superior one-way and bi-directional repeatability.

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FHA-C H

FHA-C H

FHA-C Series servo actuators are now available with IP65 protection. Four sizes are available: 17, 25, 32 and 40. The new IP65 rated version of our FHA-C actuator is ideal for harsh environments.

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SHA-SG

SHA-SG

Hollow shaft actuator with a compact outer diameter and exceptional torque/volume ratio. Peak torque 73~3419 Nm, Max speed 17.4~117.6.

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SHA-CG

SHA-CG

Hollow shaft actuator offering direct drive motor performance, while being more compact and weighing 80-90% less. Offers superior precision rotary positioning.

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Servo Mount Planetary Gearboxes

HPN-A Planetary Gearbox

HPN-A Planetary Gearbox

Value Series Harmonic Planetary® Gearbox. Low cost solution without the need to compromise on quality or performance

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HPN-L Planetary Gearbox

HPN-L Planetary Gearbox

Value Series Harmonic Planetary® Gearbox. Industry Standard Face-Mount Helical Planetary Gearheads for Servo Grade Performance

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HPGP Planetary Gearbox

HPGP Planetary Gearbox

High-Torque, High-Precision, Harmonic Planetary® Gearbox with <3 arc-min Backlash. Peak Torque: 12Nm to 3,940Nm

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HPG Planetary Gearbox

HPG Planetary Gearbox

High-Precision, Harmonic Planetary® Gearbox with <3 arc-min Backlash. Repeatability ±20 arc-sec

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HPG-RA Planetary Gearbox

HPG-RA Planetary Gearbox

Right Angle Harmonic Planetary® Gearbox with <3 arc-min Backlash. Available in 3 Frame Sizes

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HPG-R Planetary Gearbox

HPG-R Planetary Gearbox

HPG-R Helical Harmonic Planetary® gearbox offers all ratios 3:1 through 10:1

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HP8

HP8

New miniature high-performance gearheads for small servomotors.

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HPN Right Angle

HPN Right Angle

Right angle Value Series Harmonic Planetary® Gearhead with Fast Delivery

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